METHODS, SYSTEMS, AND APPARATUS FOR MASS FLOW VERIFICATION BASED ON CHOKED FLOW

Mass flow verification systems and apparatus may verify mass flow rates of mass flow controllers (MFCs) based on choked flow principles. These systems and apparatus may include a plurality of differently-sized flow restrictors coupled in parallel. A wide range of flow rates may be verified via selec...

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Bibliographische Detailangaben

Hauptverfasser:	RAJARAM, Jaidev, HOUGH, Justin, JOSEPHSON, Marcel E, BRASHEAR, Kevin M, OKADA, Ashley M, YE, Zhiyuan
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CONTROLLING MEASURING MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METERING BY VOLUME PHYSICS REGULATING SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES TESTING
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