METHOD OF PROCESSING A SUBSTRATE AND SUBSTRATE CARRIER SYSTEM

Embodiments described herein relate to a method of processing a substrate. The method comprises chucking the substrate to a support surface with a plurality of spaced-apart chuck zones of an electrostatic or magnetic chuck assembly, wherein at least one redundant chuck zone (31) of the plurality of...

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Bibliographische Detailangaben
Hauptverfasser:	KRAUSS, Harald, ZILBAUER, Thomas Werner
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY INDUCTANCES MAGNETS MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES SEMICONDUCTOR DEVICES TRANSFORMERS
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