SUBSTRATE SUPPORT PEDESTAL HAVING PLASMA CONFINEMENT FEATURES

A method and apparatus for a heated substrate support pedestal is provided. In one embodiment, the heated substrate support pedestal includes a body comprising a ceramic material, a plurality of heating elements encapsulated within the body A stem is coupled to a bottom surface of the body. A plural...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHO, Jaeyong, YE, Zheng John, SU, Zonghui, ZHOU, Jianhua, HAMMOND, Edward P., IV, ROCHA-ALVAREZ, Juan Carlos, LIN, Xing
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS SEMICONDUCTOR DEVICES
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