MICRO-PATTERN FORMING APPARATUS AND MICRO-PATTERN FORMING METHOD
The present invention relates to a micro-pattern forming apparatus which can form precise micro-patterns by using a nano-fluid into which nano-particles have been mixed, and to a micro-pattern forming method using the micro-pattern forming apparatus. La présente invention concerne un appareil de for...
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| Format: | Patent |
| Sprache: | eng ; fre ; kor |
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| Zusammenfassung: | The present invention relates to a micro-pattern forming apparatus which can form precise micro-patterns by using a nano-fluid into which nano-particles have been mixed, and to a micro-pattern forming method using the micro-pattern forming apparatus.
La présente invention concerne un appareil de formation de micro-motifs capable de former des micro-motifs précis en faisant appel à un nano-fluide dans lequel des nanoparticules ont été mélangées, ainsi qu'un procédé de formation de micro-motifs mettant en oeuvre ledit appareil de formation de micro-motifs.
발명은 나노입자가흔입된 나노유체를 이용하여 정밀한 미세 패턴 형성 가능한미세 라인 형성장치 및 이를 이용한 미세 라인 형성방법에 관한 것이다. |
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