ELECTRON SOURCE FOR A FREE ELECTRON LASER

An electron source, e.g. for a free electron laser used for EUV lithography comprises: * a cathode (203) configured to be connected to a negative potential (100, 101); * a laser (110) configured to direct pulses of radiation onto the cathode so as to cause the cathode to emit bunches of electrons; *...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NIKIPELOV, Andrey, Alexandrovich, ENGELEN, Wouter, Joep, BRUSSAARD, Gerrit, Jacobus, Hendrik
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES USING STIMULATED EMISSION ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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