XPS AND RAMAN SAMPLE ANALYSIS SYSTEM AND METHOD

A process of analyzing a sample by Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) includes providing a sample having a sample surface within a vacuum chamber, performing a Raman spectroscopic analysis on a plurality of selected areas of the sample surface within the vacuum chamber to...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GLENISTER, Christopher Kenneth, HIBBARD, Noah, MEYER, Matthew Wayne, NUNNEY, Timothy Sion
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	COLORIMETRY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY TESTING
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