FLUID LEAKAGE DETECTION FOR A MILLISECOND ANNEAL SYSTEM

Systems and methods for detecting a fluid leak associated with fluid cooled components in a millisecond anneal system are provided. In one example implementation, a millisecond anneal system can include a processing chamber having one or more fluid cooled components. The system can include a gas flo...

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Bibliographische Detailangaben

Hauptverfasser:	HEZLER, Dieter, MUELLER, Manuel
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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