ON-BOARD METROLOGY (OBM) DESIGN AND IMPLICATION IN PROCESS TOOL

Implementations of the present disclosure generally relate to an improved factory interface that is coupled to an on-board metrology housing configured for measuring film properties of a substrate. In one implementation, an apparatus comprises a factory interface, and a metrology housing removably c...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	PONNEKANTI, Hari K, PINSON, Jay D., II, ATHANI, Shekhar, PAUL, Khokan C, ROCHA-ALVAREZ, Juan Carlos, PANAVALAPPIL KUMARANKUTTY, Hanish Kumar, CHOUDHURY, Rupankar, KUMPALA, Sandeep
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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