VIBRATION ISOLATION DEVICE, LITHOGRAPHIC APPARATUS AND METHOD TO TUNE A VIBRATION ISOLATION DEVICE

The invention provides a vibration isolation device (VI) configured to support a structure (ST), comprising: * an air mount (AM) having a base part (BP) mounted on a reference structure and a vibration isolated part (VIP), and * an inverted pendulum device (IP), wherein a lower end of the inverted p...

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Bibliographische Detailangaben
Hauptverfasser:	VAN LANKVELT, Alexander, Petrus, Josephus, SEIJGER, Olav, Johannes
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BLASTING CINEMATOGRAPHY ELECTROGRAPHY ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING HOLOGRAPHY LIGHTING MATERIALS THEREFOR MEANS FOR DAMPING VIBRATION MECHANICAL ENGINEERING ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SHOCK-ABSORBERS SPRINGS THERMAL INSULATION IN GENERAL WEAPONS
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