AXIALLY COMPLIANT BEARING FOR PRECISION POSITIONING
An axially compliant rolling bearing for precision motion stages having a stage, at least one bearing member slidably disposed along a rail, and a compliant joint interconnecting the at least one roller bearing to the stage. The compliant joint is sufficiently compliant to permit movement of the sta...
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Format: | Patent |
Sprache: | eng ; fre |
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Zusammenfassung: | An axially compliant rolling bearing for precision motion stages having a stage, at least one bearing member slidably disposed along a rail, and a compliant joint interconnecting the at least one roller bearing to the stage. The compliant joint is sufficiently compliant to permit movement of the stage in the axial direction while remaining stiff in other directions orthogonal to the axial direction.
L'invention concerne un palier à roulement axialement flexible pour des platines à mouvement de précision comprenant une platine, au moins un élément de palier disposé de façon coulissante le long d'un rail, et un joint flexible reliant le ou les paliers à roulement à la platine. Le joint flexible est suffisamment flexible pour permettre le déplacement de la platine dans la direction axiale tout en restant rigide dans d'autres directions orthogonales à la direction axiale. |
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