APPARATUS FOR PROCESSING OF A MATERIAL ON A SUBSTRATE, COOLING ARRANGEMENT FOR A PROCESSING APPARATUS, AND METHOD FOR MEASURING PROPERTIES OF A MATERIAL PROCESSED ON A SUBSTRATE

According to one aspect of the present disclosure, an apparatus for processing of a material on a substrate is provided. The apparatus includes a vacuum chamber (110) and a measuring arrangement (160) configured for measuring one or more properties of the substrate (15) and/or of the material proces...

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Bibliographische Detailangaben
Hauptverfasser:	LOTZ, Hans-Georg, HERMANNS, Uwe
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS METALLURGY PHYSICS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TESTING
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