APPARATUS FOR PROCESSING OF A MATERIAL ON A SUBSTRATE, COOLING ARRANGEMENT FOR A PROCESSING APPARATUS, AND METHOD FOR MEASURING PROPERTIES OF A MATERIAL PROCESSED ON A SUBSTRATE

According to one aspect of the present disclosure, an apparatus for processing of a material on a substrate is provided. The apparatus includes a vacuum chamber (110) and a measuring arrangement (160) configured for measuring one or more properties of the substrate (15) and/or of the material proces...

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Bibliographische Detailangaben
Hauptverfasser:	LOTZ, Hans-Georg, HERMANNS, Uwe
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS METALLURGY PHYSICS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TESTING
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Beschreibung
Zusammenfassung:	According to one aspect of the present disclosure, an apparatus for processing of a material on a substrate is provided. The apparatus includes a vacuum chamber (110) and a measuring arrangement (160) configured for measuring one or more properties of the substrate (15) and/or of the material processed on the substrate, wherein the measuring arrangement comprises a cooling device (170) with a thermoelectric cooler (171) for cooling at least one heat generating component (161) of the measuring arrangement. According to another aspect, a cooling arrangement (50) for such an apparatus is provided. The cooling arrangement includes a cooling device with a thermoelectric cooler for cooling at least one heat generating component of a measuring arrangement arranged in a vacuum chamber; and a transport device configured for moving the cooling device within the vacuum chamber. La présente invention porte, selon un aspect, sur un appareil de traitement d'un matériau sur un substrat. L'appareil comprend une chambre à vide (110) et un agencement de mesure (160) configuré de sorte à mesurer une ou plusieurs propriétés du substrat (15) et/ou du matériau traité sur le substrat, l'agencement de mesure comprenant un dispositif de refroidissement (170) ayant un refroidisseur thermoélectrique (171) destiné à refroidir au moins un composant produisant de la chaleur (161) de l'agencement de mesure. Selon un autre aspect, la présente invention se rapporte à un agencement de refroidissement (50) pour un tel appareil. L'agencement de refroidissement comprend un dispositif de refroidissement ayant un refroidisseur thermoélectrique destiné à refroidir au moins un composant produisant de la chaleur d'un agencement de mesure disposé dans une chambre à vide ; et un dispositif de transport configuré de sorte à déplacer le dispositif de refroidissement à l'intérieur de la chambre à vide.