YTTRIUM OXYFLUORIDE, STARTING MATERIAL POWDER FOR PRODUCTION OF STABILIZED YTTRIUM OXYFLUORIDE, AND METHOD FOR PRODUCING STABILIZED YTTRIUM OXYFLUORIDE

This yttrium oxyfluoride is represented by YOF and is stabilized by a fluoride represented by CaF2. It is preferable that the number of moles of of Ca is from 8 moles to 40 moles (inclusive) relative to 100 moles of yttrium. A starting material powder according to the present invention is composed o...

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Bibliographische Detailangaben
Hauptverfasser: KOIDE, Masahiro, IMAURA, Shoji, SETO, Yasuhiro
Format: Patent
Sprache:eng ; fre ; jpn
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