LASER IRRADIATION METHOD AND DEVICE

In the present invention, a plurality of parallel scanning lines is set in the x direction arranged with a scanning line gap Py in the y direction, the longitudinal direction of a linear laser spot (W) is oriented in the y direction, and laser light is irradiated on each irradiation position of widt...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YAMASHITA Yasuhiro, SATO Ryosuke, INAMI Toshio
Format: Patent
Sprache:eng ; fre ; jpn
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