APPARATUS AND METHOD FOR PLASMA IGNITION WITH A SELF-RESONATING DEVICE

Methods and apparatus for igniting a process plasma within a plasma chamber are provided. One or more self-resonating devices are positioned within a plasma chamber relative to a plasma generation volume within the plasma chamber. The plasma generation volume is defined by the plasma chamber. Each o...

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Bibliographische Detailangaben

Hauptverfasser:	SMITH, SHAUN, T, WU, CHEN, WALTHER, STEVEN, R
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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