LASER NANOSTRUCTURING AND MICROSTRUCTURING OF SILICON USING A LASER-INDUCED PLASMA FOR THE PROCESSING OF THE PROCESSING LASER BEAM

Laser nanostructuring and microstructuring of silicon using a laser-induced plasma for the processing of the processing laser beam. The method according to the invention is characterised in that it comprises a step of ablation wherein a first, ablation pulsed laser beam is directed, with a fluence i...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	RAMOS BARRADO, JOSÉ RAMÓN, ROMERO PAREJA, ROCÍO, PALANCO LÓPEZ, SANTIAGO, MARINO, SALVATORE, GABÁS PÉREZ, MERCEDES
Format:	Patent
Sprache:	eng ; fre ; spa
Schlagworte:	CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING MACHINE TOOLS MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES METAL-WORKING NOT OTHERWISE PROVIDED FOR MICROSTRUCTURAL TECHNOLOGY NANOTECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SOLDERING OR UNSOLDERING SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES TRANSPORTING WELDING WORKING BY LASER BEAM
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