APPARATUS FOR AND METHOD OF SUPPLYING TARGET MATERIAL
An EUV light source target material handling system Is disclosed which includes a target material dispenser and a target material repository in which solid target material in the target material repository is converted to target material in liquid form through the use of inductive heating. L'in...
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| creator | RAJYAGURU, CHIRAG BAUMGART, PETER, MICHAEL ALGOTS, JOHN, MARTIN ISHIKAWA, TETSUYA |
| description | An EUV light source target material handling system Is disclosed which includes a target material dispenser and a target material repository in which solid target material in the target material repository is converted to target material in liquid form through the use of inductive heating.
L'invention concerne un système de gestion de matériau cible de source de lumière EUV, qui comprend un distributeur de matériau cible et un récipient de matériau cible, où un matériau cible solide dans le récipient de matériau cible est converti en matériau cible sous forme liquide par l'utilisation d'un chauffage inductif. |
| format | Patent |
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L'invention concerne un système de gestion de matériau cible de source de lumière EUV, qui comprend un distributeur de matériau cible et un récipient de matériau cible, où un matériau cible solide dans le récipient de matériau cible est converti en matériau cible sous forme liquide par l'utilisation d'un chauffage inductif.</description><subject>GAMMA RAY OR X-RAY MICROSCOPES</subject><subject>IRRADIATION DEVICES</subject><subject>NUCLEAR ENGINEERING</subject><subject>NUCLEAR PHYSICS</subject><subject>PHYSICS</subject><subject>TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2016</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZDB1DAhwDHIMCQ1WcPMPUnD0c1HwdQ3x8HdR8HdTCA4NCPCJ9PRzVwhxDHJ3DVHwdQxxDfJ09OFhYE1LzClO5YXS3AzKbq4hzh66qQX58anFBYnJqXmpJfHh_kYGhmYG5saGlgaOhsbEqQIAiFcoiA</recordid><startdate>20160512</startdate><enddate>20160512</enddate><creator>RAJYAGURU, CHIRAG</creator><creator>BAUMGART, PETER, MICHAEL</creator><creator>ALGOTS, JOHN, MARTIN</creator><creator>ISHIKAWA, TETSUYA</creator><scope>EVB</scope></search><sort><creationdate>20160512</creationdate><title>APPARATUS FOR AND METHOD OF SUPPLYING TARGET MATERIAL</title><author>RAJYAGURU, CHIRAG ; BAUMGART, PETER, MICHAEL ; ALGOTS, JOHN, MARTIN ; ISHIKAWA, TETSUYA</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_WO2016073190A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre</language><creationdate>2016</creationdate><topic>GAMMA RAY OR X-RAY MICROSCOPES</topic><topic>IRRADIATION DEVICES</topic><topic>NUCLEAR ENGINEERING</topic><topic>NUCLEAR PHYSICS</topic><topic>PHYSICS</topic><topic>TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR</topic><toplevel>online_resources</toplevel><creatorcontrib>RAJYAGURU, CHIRAG</creatorcontrib><creatorcontrib>BAUMGART, PETER, MICHAEL</creatorcontrib><creatorcontrib>ALGOTS, JOHN, MARTIN</creatorcontrib><creatorcontrib>ISHIKAWA, TETSUYA</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>RAJYAGURU, CHIRAG</au><au>BAUMGART, PETER, MICHAEL</au><au>ALGOTS, JOHN, MARTIN</au><au>ISHIKAWA, TETSUYA</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>APPARATUS FOR AND METHOD OF SUPPLYING TARGET MATERIAL</title><date>2016-05-12</date><risdate>2016</risdate><abstract>An EUV light source target material handling system Is disclosed which includes a target material dispenser and a target material repository in which solid target material in the target material repository is converted to target material in liquid form through the use of inductive heating.
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| subjects | GAMMA RAY OR X-RAY MICROSCOPES IRRADIATION DEVICES NUCLEAR ENGINEERING NUCLEAR PHYSICS PHYSICS TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR |
| title | APPARATUS FOR AND METHOD OF SUPPLYING TARGET MATERIAL |
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