SURFACE PHOTOVOLTAGE CALIBRATION STANDARD

A method of preparing an iron-implanted semiconductor wafer for use in surface photovoltage iron mapping and other evaluation techniques. A semiconductor wafer is implanted with iron through the at least two different regions of the front surface of the semiconductor at different iron implantation d...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CREPIN, ROBERT JAMES, RAPOPORT, IGOR, TAYLOR, PATRICK ALAN
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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