COATING FILM, MANUFACTURING METHOD FOR SAME, AND PVD DEVICE

Provided are a coating film, a manufacturing method for the same, and a PVD device that not only sufficiently improve the balance of low-friction properties and wear resistance, but also improve chipping resistance and peeling resistance. This film coats a substrate surface, wherein the coating film...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SHIBATA, AKINORI, OGAWA, KATSUAKI, OKAZAKI, TAKAHIRO, SUGIURA, HIROYUKI, ITO, YOSHIHIRO, SAITO, TAKASHI, ARAHI, TETSUMI, TANAKA, YOSHIKAZU, MORIGUCHI, HIDEKI
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOUNDS THEREOF DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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