A LITHOGRAPHIC APPARATUS AND AN OBJECT POSITIONING SYSTEM

A lithographic apparatus comprising an object table which carries an object. The lithographic apparatus may further comprise at least one sensor as part of a measurement system to measure a characteristic of the object table, the environment surrounding the lithographic apparatus or another componen...

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Hauptverfasser:	BLOKS, RUUD, HENDRICUS, MARTINUS, JOHANNES, NEEFS, PATRICIUS, JACOBUS, OVERKAMP, JIM, VINCENT, RENDERS, MICHAEL, JOHANNES, HENDRIKA, WILHELMINA, KUNNEN, JOHAN, GERTRUDIS, CORNELIS, LAURENT, THIBAULT, SIMON, MATHIEU, KOEVOETS, ADRIANUS, HENDRIK, SAPUTRA, PUTRA, BERENDSEN, CHRISTIANUS, WILHELMUS, JOHANNES, CORTIE, ROGIER, HENDRIKUS, MAGDALENA
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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