THROUGH PROCESS FLOW INTRA-CHIP AND INTER-CHIP ELECTRICAL ANALYSIS AND PROCESS CONTROL USING IN-LINE NANOPROBING

System for performing in-line nanoprobing on semiconductor wafer. A wafer support or vertical wafer positioner is attached to a wafer stage. An SEM column, an optical microscope and a plurality of nanoprobe positioners are all attached to the ceiling. The nanoprobe positioners have one nanoprobe con...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	UKRAINTSEV, VLADIMIR, NIV, ISRAEL, BENZION, RONEN
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS SEMICONDUCTOR DEVICES TESTING
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