DEPOSITION OF ZINC OXYSULPHIDE BY CVD

A method of coating a substrate with zinc oxysulphate (ZnO(1-x)Sx, where 0 ≤ x ≤ 1) by atmospheric pressure chemical vapour deposition is disclosed. Various precursors offering sources of zinc, oxygen and sulphur are provided. Procédé d'application sur un substrat d'un revêtement d'ox...

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Hauptverfasser: STRICKLER, DAVID ALAN, HARRIS, PETER MICHAEL, NICHOL, GARY ROBERT, PALMER, LIAM SONIE, COLLEY, ANNA LOUISE
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creator STRICKLER, DAVID ALAN
HARRIS, PETER MICHAEL
NICHOL, GARY ROBERT
PALMER, LIAM SONIE
COLLEY, ANNA LOUISE
description A method of coating a substrate with zinc oxysulphate (ZnO(1-x)Sx, where 0 ≤ x ≤ 1) by atmospheric pressure chemical vapour deposition is disclosed. Various precursors offering sources of zinc, oxygen and sulphur are provided. Procédé d'application sur un substrat d'un revêtement d'oxysulfate de zinc (ZnO(1-x)Sx, où 0 ≤ x ≤ 1) par dépôt chimique en phase vapeur à pression atmosphérique. La présente invention concerne également divers précurseurs offrant des sources de zinc, d'oxygène et de soufre.
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Various precursors offering sources of zinc, oxygen and sulphur are provided. Procédé d'application sur un substrat d'un revêtement d'oxysulfate de zinc (ZnO(1-x)Sx, où 0 ≤ x ≤ 1) par dépôt chimique en phase vapeur à pression atmosphérique. 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subjects CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DIFFUSION TREATMENT OF METALLIC MATERIAL
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
METALLURGY
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
title DEPOSITION OF ZINC OXYSULPHIDE BY CVD
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