DEPOSITION OF ZINC OXYSULPHIDE BY CVD

A method of coating a substrate with zinc oxysulphate (ZnO(1-x)Sx, where 0 ≤ x ≤ 1) by atmospheric pressure chemical vapour deposition is disclosed. Various precursors offering sources of zinc, oxygen and sulphur are provided. Procédé d'application sur un substrat d'un revêtement d'ox...

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Bibliographische Detailangaben
Hauptverfasser:	STRICKLER, DAVID ALAN, HARRIS, PETER MICHAEL, NICHOL, GARY ROBERT, PALMER, LIAM SONIE, COLLEY, ANNA LOUISE
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	A method of coating a substrate with zinc oxysulphate (ZnO(1-x)Sx, where 0 ≤ x ≤ 1) by atmospheric pressure chemical vapour deposition is disclosed. Various precursors offering sources of zinc, oxygen and sulphur are provided. Procédé d'application sur un substrat d'un revêtement d'oxysulfate de zinc (ZnO(1-x)Sx, où 0 ≤ x ≤ 1) par dépôt chimique en phase vapeur à pression atmosphérique. La présente invention concerne également divers précurseurs offrant des sources de zinc, d'oxygène et de soufre.