LITHOGRAPHIC APPARATUS, METHOD FOR POSITIONING AN OBJECT IN A LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

The invention relates to a lithographic apparatus comprising: a first object, a second object which is moveable relative to the first object in a moving direction, a set of cables and/or tubing arranged between the first object and the second object, a guiding drum to guide the set of cables and/or...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	BROERS, SANDER, CHRISTIAAN
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!