METHOD OF MANUFACTURING A STACKED ORGANIC LIGHT EMITTING DIODE, STACKED OLED DEVICE, AND APPARATUS FOR MANUFACTURING THEREOF

The invention is directed at a method of manufacturing a stacked organic light emitting diode - OLED - device. The method comprises the steps of providing a carrier (9) and forming a first organic light emitting diode (9) on the carrier by means of solution based depositing of consecutive diode laye...

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Bibliographische Detailangaben
Hauptverfasser:	WILSON, JOANNE SARAH, LEVELL, JACK WILLIAM
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The invention is directed at a method of manufacturing a stacked organic light emitting diode - OLED - device. The method comprises the steps of providing a carrier (9) and forming a first organic light emitting diode (9) on the carrier by means of solution based depositing of consecutive diode layers of said first organic light emitting diode. The method further comprises forming one or more charge injection layers (12, 14) on the first organic light emitting diode and forming a second organic light emitting diode (16) on the carrier by means of solution based depositing of consecutive diode layers of said second organic light emitting diode. The step of forming of the one or more charge injection layers comprises a step of performing atomic layer deposition for depositing at least one of the one or more charge injection layers. The invention further relates to an apparatus for manufacturing a stacked OLED and to a stacked OLED device. L'invention porte sur un procédé de fabrication d'un dispositif à DELO-diode électroluminescente organique empilée. Le procédé comprend les étapes consistant à utiliser un support (9) et former une première diode électroluminescente organique (9) sur le support au moyen d'un dépôt, à partir de solutions, de couches de diode consécutives de ladite première diode électroluminescente organique. Le procédé comprend en outre la formation d'une ou plusieurs couches d'injection de charges (12, 14) sur la première diode électroluminescente organique et la formation d'une seconde diode électroluminescente organique (16) sur le support au moyen d'un dépôt, à partir de solutions, de couches de diode consécutives de ladite seconde diode électroluminescente organique. L'étape consistant à former ladite ou lesdites couches d'injection de charges comprend une étape consistant à effectuer un dépôt de couches atomiques (ALD) pour le dépôt d'au moins l'une de ladite ou desdites couches d'injection de charges. L'invention se rapporte en outre à un appareil permettant la fabrication d'une DELO empilée et à un dispositif à DELO empilée.