CONDENSER MICROPHONE WITH NON-CIRCULAR MEMBRANE

A non-uniform stress distribution of a MEMS microphone having a non-circular shape is compensated by a structured back plate that has a compensating structure to provide a stress distribution opposite to that of the membrane. La répartition de contrainte non uniforme d'un microphone à MEMS ayan...

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Bibliographische Detailangaben
Hauptverfasser:	RAVNKILDE, JAN TUE, GINNERUP, MORTEN, MORTENSEN, DENNIS
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY FOR PERFORMING MECHANICAL WORK IN GENERAL GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PUBLIC ADDRESS SYSTEMS TRANSPORTING
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Beschreibung
Zusammenfassung:	A non-uniform stress distribution of a MEMS microphone having a non-circular shape is compensated by a structured back plate that has a compensating structure to provide a stress distribution opposite to that of the membrane. La répartition de contrainte non uniforme d'un microphone à MEMS ayant une forme non circulaire est compensée par une plaque arrière structurée qui a une structure de compensation qui confère une répartition de contrainte opposée à celle de la membrane.