FLUORINATED AND HYDROGENATED DIAMOND-LIKE CARBON MATERIALS FOR ANTI-REFLECTIVE COATINGS

Fluorinated and hydrogenated diamond-like carbon ("DLC-FH") that have unique optical properties differ as a class from the existing DLC art, whose refractive indices [n] are limited to rather high values above a lower threshold of 1.7, and can range up to about 2.7. The DLC-FH materials ca...

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Hauptverfasser: SCHUELKE, THOMAS, HAUBOLD, LARS, SLAGTER, JOHN, THOMAS, TSU, DAVID, V
Format: Patent
Sprache:eng ; fre
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