COIL ASSEMBLY, ELECTROMAGNETIC ACTUATOR, STAGE POSITIONING DEVICE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

A coil assembly for an electromagnetic actuator or motor is described, the coil assembly including a magnetic core comprising at least one pair of slots; a coil, at least partly mounted inside the at least one pair of slots; and a cooling member, the cooling member being mounted to a surface of the...

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Bibliographische Detailangaben
Hauptverfasser:	HUANG, YANG-SHAN, NIJSSE, GERARD, JOHANNES, PIETER, KIM, MINKYU
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DYNAMO-ELECTRIC MACHINES ELECTRICITY ELECTROGRAPHY GENERATION HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	A coil assembly for an electromagnetic actuator or motor is described, the coil assembly including a magnetic core comprising at least one pair of slots; a coil, at least partly mounted inside the at least one pair of slots; and a cooling member, the cooling member being mounted to a surface of the coil. La présente invention concerne un ensemble bobine pour un actionneur ou moteur électromagnétique, l'ensemble bobine comportant un noyau magnétique comprenant au moins une paire de fentes; une bobine, montée au moins en partie à l'intérieur de ladite au moins une paire de fentes; un organe de refroidissement, l'organe de refroidissement étant monté à une surface de la bobine.