APPARATUS AND METHOD FOR MANUFACTURING A PELLICLE, AND A PELLICLE

An apparatus for manufacturing a pellicle, the apparatus comprising: a stressing assembly for stressing a film; and a substrate support for supporting a substrate, the stressing assembly and the substrate support being capable of relative movement so as to bring the substrate into contact with the f...

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Bibliographische Detailangaben
Hauptverfasser:	ARIAS ESPINOZA, JUAN DIEGO, JANSEN, MAARTEN, MATHIJS, MARINUS, DE KUSTER, JOHANNES, PETERUS, HENRICUS
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	An apparatus for manufacturing a pellicle, the apparatus comprising: a stressing assembly for stressing a film; and a substrate support for supporting a substrate, the stressing assembly and the substrate support being capable of relative movement so as to bring the substrate into contact with the film when the film is stressed. La présente invention concerne un appareil pour la fabrication d'une pellicule, l'appareil comportant: un ensemble de mise en tension pour la mise en tension d'un film; et un support de substrat pour le support d'un substrat, l'ensemble de mise en tension et le support de substrat étant capables d'un mouvement relatif afin d'amener le substrat en contact avec le film lors de la mise en tension du film.