LIGHT PROJECTION DEVICE

The purpose of the present invention is to provide a light projection device able to process an object of processing uniformly and with high processing efficiency. This light projection device is provided with the following: an object-of-processing support base onto which the object of processing is...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	HABU, TOMOYUKI
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS CINEMATOGRAPHY CLEANING CLEANING IN GENERAL DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY FREQUENCY-CHANGING HOLOGRAPHY MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS MATERIALS THEREFOR NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PREVENTION OF FOULING IN GENERAL PRINTED CIRCUITS SEMICONDUCTOR DEVICES TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TRANSPORTING
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Beschreibung
Zusammenfassung:	The purpose of the present invention is to provide a light projection device able to process an object of processing uniformly and with high processing efficiency. This light projection device is provided with the following: an object-of-processing support base onto which the object of processing is disposed; an ultraviolet lamp for emitting vacuum ultraviolet radiation to a processing surface of the object of processing; and a light transmitting window member that is provided between the object of processing and the ultraviolet lamp, and that passes the vacuum ultraviolet radiation from the ultraviolet lamp. The light projection device is characterized by the following: the size of a gap formed between the processing surface of the object of processing and the light transmitting window member is no more than 1mm; provided in the gap is a gas supply means for supplying a processing gas in such a manner that the gas travels along the processing surface in one direction; and on the object-of-processing support base, an air blocking member is provided extending along the supply direction of the processing gas and in a region in which the object of processing is not positioned. Le but de la présente invention est de produire un dispositif de projection de lumière pouvant traiter un objet de traitement de manière uniforme et à rendement élevé. Ce dispositif de projection de lumière comprend les éléments suivants : une base de support d'objet de traitement sur laquelle est disposé l'objet de traitement ; une lampe ultraviolette pour émettre un rayonnement ultraviolet sous vide sur une surface de traitement de l'objet de traitement ; et un élément de fenêtre de transmission de lumière qui est disposé entre l'objet de traitement et la lampe ultraviolette et qui fait passer le rayonnement ultraviolet sous vide depuis la lampe ultraviolette. Le dispositif de projection de lumière est caractérisé par les éléments suivants : la dimension d'un intervalle formé entre la surface de traitement de l'objet de traitement et l'élément de fenêtre de transmission de lumière ne font pas plus d'1 mm; dans l'intervalle est disposé un moyen d'alimentation du gaz pour fournir un gaz de traitement de telle sorte que le gaz se déplace le long de la surface de traitement dans une direction ; et sur la base de support de l'objet de traitement, un élément de blocage de l'air s'étend le long de la direction d'alimentation du gaz de traitement et dans une région dans laquelle n'est pas pos