HEMISPHERICAL SCANNING OPTICAL SCATTEROMETER

A hemispherical scanning optical scatteronieter and method for its use for measuring scattered radiation, with a reflected scatter measurement laser, and/or a transmitted scatter measurement laser, an array of optical detectors, a computer controlled system to rotate the array of optical detectors,...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	STOVER, JOHN, HEGSTROM, ERIC
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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