DIELECTRIC BARRIER DISCHARGE REACTING APPARATUS FOR PRODUCING DISILANE, TRISILANE, AND TETRASILANE

The present invention relates to a dielectric barrier discharge reacting apparatus for producing disilane, trisilane, and tetrasilane and, more specifically, to a dielectric barrier discharge reacting apparatus for producing disilane, trisilane, and tetrasilane, which is capable of producing not onl...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JANG, HYANG-JA, YUICHI, IIKUBO
Format:	Patent
Sprache:	eng ; fre ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMISTRY COMPOUNDS THEREOF ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL THEIR RELEVANT APPARATUS TRANSPORTING
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