STRAIN MAPPING IN TEM USING PRECESSION ELECTRON DIFFRACTION

A sample material is scanned with a transmission electron microscope (TEM) over multiple steps having a predetermined size at a predetermined angle. Each scan at a predetermined step and angle is compared to a template, wherein the template is generated from parameters of the material and the scanni...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TAHERI, MITRA LENORE, LEFF, ASHER CALVIN
Format: Patent
Sprache:eng ; fre
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