PROJECTION LENS WITH WAVEFRONT MANIPULATOR

A projection lens for imaging a pattern arranged in an object plane (OS) of the projection lens into an image plane of the projection lens by means of electromagnetic radiation having an operating wavelength λ1 of maxima and a number NMIN>1 of minima of an optical path length change of the projection radiation according to a characteristic period PCHAR=DFP/((NMAX+NMIN)/2). The first manipulator surface is arranged at a finite first distance (D1) from a closest field plane (OS) of the projection lens in optical proximity to said field plane in such a way that each beam emerging from a field point of the field plane at the first manipulator surface illuminates a subaperture having a subaperture diameter SAD and the condition SAD/DFP< 0.2 holds true at the first manipulator surface. La présente invention concerne un objectif de projection permettant de former une image d'un motif agencé dans un plan d'objet (OS) de l'objectif de projection en un plan d'image de l'objectif de projection au moyen d'un rayonnement électromagnétique ayant une longueur d'onde de fonctionnement λ