CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER WITH MULTIPLE DEFLECTABLE MEMBRANES

A capacitive micromachined ultrasonic transducer (CMUT) having at least two deflectable membranes. The membranes are spaced from each other, and the membranes contribute to and/or are responsive to receive or transmit an ultrasonic signal. Spacing between the at least two deflectable membranes is ad...

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Bibliographische Detailangaben
Hauptverfasser:	EMADI, TAHEREH AREZOO, BUCHANAN, DOUGLAS A
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	ANALOGOUS ARRANGEMENTS USING OTHER WAVES ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS DETECTING MASSES OR OBJECTS DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES DIAGNOSIS FOR PERFORMING MECHANICAL WORK IN GENERAL GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL GEOPHYSICS GRAVITATIONAL MEASUREMENTS HUMAN NECESSITIES HYGIENE IDENTIFICATION LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION ORRERADIATION OF RADIO WAVES MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC ORINFRASONIC WAVES MEASURING MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR MEDICAL OR VETERINARY SCIENCE METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY PERFORMING OPERATIONS PHYSICS RADIO DIRECTION-FINDING RADIO NAVIGATION SURGERY TARIFF METERING APPARATUS TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	A capacitive micromachined ultrasonic transducer (CMUT) having at least two deflectable membranes. The membranes are spaced from each other, and the membranes contribute to and/or are responsive to receive or transmit an ultrasonic signal. Spacing between the at least two deflectable membranes is adjustable through application of a voltage to cause deflection of at least one of the deflectable membranes, to affect the receive/transmit properties of the CMUT. La présente invention concerne un transducteur échographique micro-usiné capacitif (CMUT, Capacitive Micromachined Ultrasonic Transducer) comportant au moins deux membranes déformables. Les membranes sont espacées l'une de l'autre et contribuent et/ou sont sensibles à la réception ou à l'émission d'un signal ultrasonore. L'espacement entre lesdites deux membranes déformables peut être réglé par application d'une tension provoquant une déviation d'au moins l'une des membranes déformables, cela affectant les propriétés de réception/émission du CMUT.