MICROVALVE DEVICE AND MANUFACTURING METHOD THEREFOR

Disclosed are a microvalve device and a manufacturing method therefor. The microvalve device comprises a body, at least comprising a first layer (7) and one second layer (8) forming a chamber (9) together with the first layer (7), wherein the first layer (7) is provided with at least two fluid ports...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	DENG, NING, ZHANG, SHENGCHANG, CHEN, PEIYI, WANG, ZHEYAO, JIANG, TINGHOU
Format:	Patent
Sprache:	chi ; eng ; fre
Schlagworte:	ACTUATING-FLOATS BLASTING COCKS DEVICES FOR VENTING OR AERATING ELECTRICITY ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MECHANICAL ENGINEERING TAPS THERMAL INSULATION IN GENERAL VALVES WEAPONS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	Disclosed are a microvalve device and a manufacturing method therefor. The microvalve device comprises a body, at least comprising a first layer (7) and one second layer (8) forming a chamber (9) together with the first layer (7), wherein the first layer (7) is provided with at least two fluid ports (4, 5, 6) which are in fluid communication with the chamber (9); and piezoelectric actuators (1, 2, 3) corresponding to the preset fluid ports (4, 5, 6), wherein the piezoelectric actuators (1, 2, 3) are arranged in the chamber (9) and the strain extending and retracting direction thereof is parallel to the first layer (7), with the free end of the piezoelectric actuators (1, 2, 3) in the strain extending and retracting direction being used for shielding the fluid ports (4, 5, 6) so as to control the opening/closing state of the fluid ports (4, 5, 6). The free end of the piezoelectric actuators (1, 2, 3) in the strain extending and retracting direction is directly used for shielding the fluid ports (4, 5, 6), and