DELTA DIE INTENSITY MAP MEASUREMENT

With an optical inspection tool, images of a plurality of patches of a plurality of dies of a reticle are obtained. The patch images are obtained so that each patch image is positioned relative to a same reference position within its respective die as another die- equivalent one of the patch images...

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Bibliographische Detailangaben
1. Verfasser: HESS, CARL, E
Format: Patent
Sprache:eng ; fre
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