A METHOD FOR RELEASING MEMS DEVICE

The present invention relates to a method for releasing a MEMS device which provides a complete dry release method to prevent stiction or adhesion problem during the MEMS device release process. Adopting an all-dry processing avoids the need to perform rinsing and drying process steps during fabrica...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	AZLINA, MOHD ZAIN, SHAIDI, YASIN, ABDUL HALIM, ADOM, MUHAMAD RAMDZAN, BUYONG
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING
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