PROCESS CHAMBER GAS FLOW APPARATUS, SYSTEMS, AND METHODS

Process chamber gas flow control apparatus having a tiltable valve are disclosed. The gas flow apparatus includes a process chamber adapted to contain a substrate, an exit from the process chamber including a valve seat, and a tiltable valve configured and adapted to tilt relative to the valve seat...

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Bibliographische Detailangaben
Hauptverfasser:	KANKANALA, PENCHALA N, HUDGENS, JEFFREY C, SAPKALE, CHANDRAKANT M, MUTHUKAMTCHI, KARUPPASAMY, MERRY, NIR
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	Process chamber gas flow control apparatus having a tiltable valve are disclosed. The gas flow apparatus includes a process chamber adapted to contain a substrate, an exit from the process chamber including a valve seat, and a tiltable valve configured and adapted to tilt relative to the valve seat to control flow non-uniformities within the process chamber. Systems and methods including the tiltable valve apparatus are disclosed, as are numerous other aspects. L'invention concerne un appareil à flux de gaz de chambre de procédé comportant une vanne inclinable. L'appareil à flux de gaz comprend une chambre de procédé adaptée pour contenir un substrat, une sortie de la chambre de procédé comprenant un siège de vanne, et une vanne inclinable conçue et adaptée pour s'incliner par rapport au siège de vanne pour commander les irrégularités d'écoulement au sein de la chambre de procédé. L'invention concerne des systèmes et procédés comprenant l'appareil à vanne inclinable, de même que de nombreux autres aspects.