METHOD FOR MANUFACTURING ELECTRON SOURCE

Conventional methods for processing a chip tend not to yield chips with a designated dimension of tip shape, and thus cannot yield a chip with any number of desired diameters. Also, there is a possibility that impurities may adhere to the chip. In the present invention, a chip is processed by contro...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SONOBE NOBUYUKI, NITTA HISAO, ICHIMURA TAKASHI, MURAKOSHI HISAYA, CHO BOKLAE
Format: Patent
Sprache:eng ; fre ; jpn
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