METHOD FOR PREPARING MONOSILANE BY USING TRIALKOXYSILANE

Provided is a method for preparing monosilane, more particularly a method for economically preparing monosilane, which is useful for the composition of a thin semiconductor structure and multipurpose high-purity polycrystalline silicon, by preparing monosilane with high purity and high yield using t...

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Hauptverfasser:	KIM, DEOK YUN, KHATAM, ASHUROV, KHEKAYAT, ASHUROVA, AZIZ, KURBANOV, SULTAN, AZIZOV, VLADIMIR, ROTSHTEYN, KIM, TAEK JOONG, KIM, YONG IL, SHAVKAT, SALIKHOV, KIM, KYUNG YEOL, ILYOS, ABDISAIDOV, RUSTAM, ASHUROV
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL THEIR RELEVANT APPARATUS TRANSPORTING
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