METHOD FOR TRANSMITTING A BROADBAND ION BEAM AND ION IMPLANTER

METHOD FOR TRANSMITTING A BROADBAND ION BEAM AND ION IMPLANTER

A method for transmitting a broadband ion beam (100) and an ion implanter adopt an analyzing magnetic field (1), a calibration magnetic field (2) and an analyzing diaphragm (6) to transmit a broadband ion beam. If the analyzing magnetic field (1) enables the broadband ion beam (100) incident from an...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: XIE, JUNYU, LONG, HUIYUE, PENG, LIBO
Format: Patent
Sprache:chi ; eng ; fre
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:A method for transmitting a broadband ion beam (100) and an ion implanter adopt an analyzing magnetic field (1), a calibration magnetic field (2) and an analyzing diaphragm (6) to transmit a broadband ion beam. If the analyzing magnetic field (1) enables the broadband ion beam (100) incident from an incident plane (101) thereof to deflect anticlockwise in a horizontal direction, the calibration magnetic field (2) enables an ion beam diffusing again after passing through the analyzing diaphragm (6) to deflect clockwise in the horizontal direction; if the analyzing magnetic field (1) enables the broadband ion beam (100) incident from the incident plane (101) thereof to deflect clockwise in the horizontal direction, the calibration magnetic field (2) enables an ion beam diffusing again after passing through the analyzing diaphragm (6) to deflect anticlockwise in the horizontal direction. The analyzing magnetic field (1) and the calibration magnetic field (2) enable the ion beam to deflect along different directi