DIELECTRIC WINDOW CLEANING APPARATUSES

A dielectric window cleaning apparatus (100) may be used for cleaning a dielectric window (110) of a plasma processing device. The dielectric window cleaning apparatus may comprise a window support base, (170) a fluid containing enclosure, a window rotating mechanism, a spray arm(150), and multiple...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SHIH, HONG, AVOYAN, ARMEN, DAUGHERTY, JOHN, LACROIX, CLIFF
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CLEANING CLEANING IN GENERAL PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL TRANSPORTING
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