SYSTEM AND METHOD FOR USING A MODEL FOR IMPROVING CONTROL OF A MASS FLOW CONTROLLER

The disclosed embodiments include a method, apparatus, and computer program product for controlling the mass flow rate of a fluid. For example, the disclosed embodiments include a method and a mass flow controller configured to determine, using on valve hysteresis model, a valve drive necessary to g...

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Bibliographische Detailangaben

Hauptverfasser:	LULL, JOHN, JAMASEBI, REZA, ELLEC, CHRIS
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	ACTUATING-FLOATS BLASTING COCKS DEVICES FOR VENTING OR AERATING ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MECHANICAL ENGINEERING TAPS THERMAL INSULATION IN GENERAL VALVES WEAPONS
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