SURFACE MEASUREMENT APPARATUS AND METHOD

In a metrological apparatus a stylus (11) is deflected as a stylus tip of the stylus follows surface variations along a measurement path on a surface of a workpiece and a transducer (39) provides measurement data in a measurement coordinate system. A data processor is configured to: determine a rela...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	MANSFIELD, DANIEL IAN
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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