METHODS OF PROVIDING PATTERNED CHEMICAL EPITAXY TEMPLATES FOR SELF-ASSEMBLABLE BLOCK COPOLYMERS FOR USE IN DEVICE LITHOGRAPHY

A method of forming a patterned chemical epitaxy template, for orientation of a self-assemblable block copolymer comprising first and second polymer blocks, on a surface of a substrate, the method including applying a primer layer of a primer composition to the surface, the primer composition compri...

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Bibliographische Detailangaben

Hauptverfasser:	KOOLE, ROELOF, KETELAARS, WILHELMUS, BOOTS, HENRI, PEETERS, EMIEL, WUISTER, SANDER, YILDIRIM, OKTAY, VAN HEESCH, CHRIS, NGUYEN, THANH, BRIZARD, AURELIE
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING PHYSICS
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