SUBSTANTIALLY PLANAR ELECTRONIC DEVICES AND CIRCUITS

SUBSTANTIALLY PLANAR ELECTRONIC DEVICES AND CIRCUITS

A method of manufacturing a substantially planar electronic device is disclosed. The method employs a resist having three different thicknesses used for defining different structures in a single masking step. Examplary structures are substantially planar transistors having side-gates and diodes. L&#...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: FRYER, ANTONY COLIN, PRICE, RICHARD DAVID
Format: Patent
Sprache:eng ; fre
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A method of manufacturing a substantially planar electronic device is disclosed. The method employs a resist having three different thicknesses used for defining different structures in a single masking step. Examplary structures are substantially planar transistors having side-gates and diodes. L'invention concerne un procédé de fabrication d'un dispositif électronique sensiblement plat, consistant à employer une résine ayant trois épaisseurs différentes permettant de définir différentes structures au cours d'une seule étape de masquage. Des structures citées en exemple sont des transistors sensiblement plats présentant des portes latérales et des diodes.