INJECTION DEVICE AND INJECTION METHOD

Provided is an injection device and an injection method with which it is possible to easily correct misalignment between an injection nozzle and an injection hole. In an injection device (20), a moving section (25) moves an object (40) to be treated in a relative manner so that an injection hole (41...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KUGA, TOHRU, YOSHIDA, MITSUNOBU, TAHIRA, TOSHIO
Format: Patent
Sprache:eng ; fre ; jpn
Schlagworte:
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