INTERCHANGEABLE MAGNET PACK

A sputtering apparatus includes a template having cells. Removable inserts are disposed within the cells. The cells may be circular, triangular, square, diamond shaped, or hex shaped. The removable inserts may be magnetic or non-magnetic inserts. A cover is connected with a first side of the templat...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	NOLAN, THOMAS P, KASSELA, WALTER STANLEY, FOO, TOON HAI
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	A sputtering apparatus includes a template having cells. Removable inserts are disposed within the cells. The cells may be circular, triangular, square, diamond shaped, or hex shaped. The removable inserts may be magnetic or non-magnetic inserts. A cover is connected with a first side of the template. A yoke is connected with a second side of the template. The removable inserts are operable to customize or shape a magnetic field over a target. The yoke is operable to provide a return path for the magnetic field. L'invention concerne un appareil de pulvérisation cathodique comprenant un gabarit présentant des cellules. Des inserts amovibles sont disposés dans les cellules. Les cellules peuvent être circulaires, triangulaires, carrées, en forme de losange ou hexagonales. Les inserts amovibles peuvent être magnétiques ou non. Un couvercle est relié à un premier côté du gabarit. Une culasse est reliée à un second côté du gabarit. Les inserts amovibles permettent de personnaliser ou de façonner un champ magnétique au-dessus d'une cible. La culasse permet de fournir un trajet de retour au champ magnétique.