MEMS SCANNING MICROMIRROR

A MEMS-micro-mirror (30) is provided comprising a mirror body (50) that is rotatably arranged in a mirror frame (60) around a rotation axis (58) extending in a plane defined by the mirror body. The rotation axis extends through a first and a second mutually opposite end-portion (51, 53) of the mirro...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	VAN LIEROP, HENDRIKUS WILHELMUS LEONARDUS ANTONIUS MARIA, SUIJLEN, MATTHIJS ALEXANDER GERARD
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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